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KMID : 0381920110410020081
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Korean Journal of Microscopy
2011 Volume.41 No. 2 p.81 ~ p.88
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Nano Scale Compositional Analysis by Atom Probe Tomography: I. Fundamental Principles and Instruments
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Jung Woo-Young
Bang Chan-Woo
Gu Gil-Ho
Park Chan-Gyung
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Abstract
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Even though importance of nano-scale structure and compositional analysis have been getting increased, existing analysis tools have been reached to their limitations. Recent development of Atom Probe Tomography (APT), providing 3-dimensional elemental distribution and compositional information with sub-nm scale special resolution and tens of ppm detection limit, is one of key technique which can overcome these limitations. However, due to the fact that APT is not well known yet in the domestic research area, it has been rarely utilized so far. Therefore, in this article, the theoretical background of APT was briefly introduced with sample preparation to help understanding APT analysis.
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KEYWORD
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Atom probe tomography, Field evaporation, Pulsed laser atom probe, Energy compensator, Focused Ion Beam
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